The approach uses lasers and holograms to detect misalignments as small as 0.017 nanometers. Researchers at the University of ...

UMass Amherst researchers have developed a laser-based holographic alignment method that could revolutionize overlay accuracy ...

meaning you can see its holographic projections using air as the medium. Here's how it works. The machine uses a 1kHz pulse laser and sends the laser through a 3D scanner, which reflects and ...