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Abstract: In this paper, we investigate the potentialities and properties of HfSiO/MG/cap/TiN gate stack devices, first by identifying the impact of the TiN thickness and its deposition procedure on ...

We report on the promise of dual channel materials using FinFETs for high-performance CMOS for sub 22 nm technology node. We demonstrate pFinFETs with all SiGe channel formed by Germanium condensation ...