ASML's acquisition of HMI will be part-funded by about 1.5 billion euros ($1.69 billion) of debt, the two companies said. The pair expects the deal to be completed in the fourth quarter of this year.

ASML entered the market in 2016, when it acquired Hermes Microvision Inc. (HMI), a supplier of e-beam inspection tools for both foundry and memory fabs worldwide, for $3.1 billion.

ASML also broadened its product offering with the creation of an e-beam-based pattern fidelity metrology system, ePfm5, and shipped the first HMI eXplore 6000 EUV reticle defect inspection system.