The benefits of these MEMS approaches include high efficiency, small size, and low cost. Automobile MEMS sensors play a key role, solving safety challenges in an extremely accurate and stable design.

Simultaneously detecting multiple signals with high precision has long challenged microelectromechanical systems (MEMS) sensors due to unavoidable interference. A new study presents a solution: a ...

Because thermal MEMS sensors do not have any moving parts, they are very long lived and resistant to shock and vibration. Together, the monolithic design and no capacitive cantilever structure of a ...

STMicroelectronics' LPS001WP is a tiny silicon pressure sensor that uses aninnovative technology to provide extremely high resolution measurements ofpressure - and altitude - in an ultra-compact and ...

A new hierarchical In2O3-based MEMS gas sensor for NO2 detection shows improved sensitivity and drastically reduced power consumption for portable applications.

Fabrication methods for MEMS sensors, such as layer deposition, photolithography, and etching, are similar to those used for basic semiconductor devices like transistors and integrated circuits.4 ...

The most established piezoelectric material-based MEMS technology uses zinc oxide (ZnO) thin films, which are widely used in film-bulk acoustic-wave resonators, surface acoustic wave resonators, ...

The D6T thermal sensors combine a MEMS micro-mirror structure for efficient IR radiation detection with a high-performance silicon lens to focus the infrared rays onto its thermopiles.

Such high-aspect-ratio capacitive gaps, as seen in Figure 2, increase the efficiency of capacitive transduction substantially, and enable an effective high-frequency interface for vibrating silicon ...

Larger 16×16 MEMS sensor arrays are currently being developed, which will provide finer lighting control, especially in open space environments. Coping with inrush currents Although presence detection ...