Aluminum alloy vacuum chambers are critical components in semiconductor manufacturing, providing the controlled environment required for processes li ...

The paper summarizes our experience with deep RIE etching of silicon for MEMS applications, including optical MEMS and sensors, with emphasis on deep RIE of SOI wafers. Most of the reported results ...

Developer Sterling Bay is losing the Lincoln Park site to impatient lenders. Now, Chicago's JDL Development is close to swooping in, sources tell the Sun-Times.